Surface chemistry of Ru : relevance to optics lifetime in EUVL

Wasielewski, R; Yakshinskiy, B. V; Hedhili, M. N; Ciszewski, Antoni; Madey, T. E

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Surface chemistry of Ru : relevance to optics lifetime in EUVL

Description

Title: Surface chemistry of Ru : relevance to optics lifetime in EUVL
Journal title: Proceedings of SPIE
Creator: Wasielewski, R ; Yakshinskiy, B. V ; Hedhili, M. N ; Ciszewski, Antoni ; Madey, T. E
Pages: nr art. 653316
Description: Materials of 23rd European Mask and Litography Conference, Grenoble, France, 22 January 2007.
Language of abstract: eng
Date issued: 2007
Type: Tekst
Language: eng
Detailed object type: art
Object type: Artykuł
Location: Vol. 6533 (2007)

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