- Effects of Ar+ ion sputtering on morphology and electric conductance of 6H-SiC (0001) surface
Description
- Title: Effects of Ar+ ion sputtering on morphology and electric conductance of 6H-SiC (0001) surface
- Journal title: Materials Science-Poland
- Creator: Mazur, Piotr ; Zuber, Stefan ; Grodzicki, Miłosz ; Ciszewski, Antoni
- Pages: s. 265-269.
- Description: Zawiera wykresy. ; Zawiera fotografie. ; Bibliogr. ; Streszcz. w jęz. ang.
- Language of abstract: eng
- Date issued: 2008
- Type: Tekst
- Language: eng
- Detailed object type: art
- Object type: Artykuł
- Location: Vol. 26, No. 2 (2008), s. 265-269. : fot.